8/8/2012	9:26:05 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/8/2012	9:26:06 AM	Recipe started at 9:26 AM
8/8/2012	9:26:06 AM	Helium valve closed
8/8/2012	9:26:06 AM	H2 valve closed
8/8/2012	9:26:06 AM	BCl3 valve closed
8/8/2012	9:26:06 AM	PH3 valve closed
8/8/2012	9:26:06 AM	SiCl4 pre valve closed
8/8/2012	9:26:06 AM	SiCl4 post valve closed
8/8/2012	9:26:06 AM	Main Vac valve closed
8/8/2012	9:26:06 AM	Bubbler valve closed
8/8/2012	9:26:06 AM	Bypass valve opened
8/8/2012	9:26:06 AM	Helium MFC set to  0.000000
8/8/2012	9:26:06 AM	H2 MFC set to  0.000000
8/8/2012	9:26:06 AM	BCl3 MFC set to  0.000000
8/8/2012	9:26:06 AM	PH3 MFC set to  0.000000
8/8/2012	9:26:06 AM	SiCl4 MFC set to  0.000000
8/8/2012	9:26:06 AM	Bypass solenoid MFC set to  0.000000
8/8/2012	9:26:06 AM	Tube furnace set to 0
8/8/2012	9:28:36 AM	Helium valve closed
8/8/2012	9:28:36 AM	H2 valve closed
8/8/2012	9:28:36 AM	BCl3 valve closed
8/8/2012	9:28:36 AM	PH3 valve closed
8/8/2012	9:28:36 AM	SiCl4 pre valve closed
8/8/2012	9:28:36 AM	SiCl4 post valve closed
8/8/2012	9:28:36 AM	Main Vac valve closed
8/8/2012	9:28:36 AM	Bubbler valve closed
8/8/2012	9:28:36 AM	Bypass valve opened
8/8/2012	9:28:36 AM	Helium MFC set to  0.000000
8/8/2012	9:28:36 AM	H2 MFC set to  0.000000
8/8/2012	9:28:36 AM	BCl3 MFC set to  0.000000
8/8/2012	9:28:36 AM	PH3 MFC set to  0.000000
8/8/2012	9:28:36 AM	SiCl4 MFC set to  0.000000
8/8/2012	9:28:36 AM	Bypass solenoid MFC set to  0.000000
8/8/2012	9:28:36 AM	Tube furnace set to 0
8/8/2012	9:29:36 AM	Helium valve closed
8/8/2012	9:29:36 AM	H2 valve closed
8/8/2012	9:29:36 AM	BCl3 valve closed
8/8/2012	9:29:36 AM	PH3 valve closed
8/8/2012	9:29:36 AM	SiCl4 pre valve closed
8/8/2012	9:29:36 AM	SiCl4 post valve closed
8/8/2012	9:29:36 AM	Bypass valve closed
8/8/2012	9:29:36 AM	Bubbler valve closed
8/8/2012	9:29:36 AM	Main Vac valve opened
8/8/2012	9:29:36 AM	Helium MFC set to  0.000000
8/8/2012	9:29:36 AM	H2 MFC set to  0.000000
8/8/2012	9:29:36 AM	BCl3 MFC set to  0.000000
8/8/2012	9:29:36 AM	PH3 MFC set to  0.000000
8/8/2012	9:29:36 AM	SiCl4 MFC set to  0.000000
8/8/2012	9:29:36 AM	Bypass solenoid MFC set to  0.000000
8/8/2012	9:29:36 AM	Tube furnace set to 0
8/8/2012	9:29:37 AM	Run finished at 9:29 AM
8/8/2012	9:29:37 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/8/2012	11:00:11 AM	Main Vac valve closed
8/8/2012	11:00:23 AM	Main Vac valve opened
8/8/2012	11:24:41 AM	Main Vac valve closed
8/8/2012	11:24:55 AM	Main Vac valve opened
8/8/2012	11:26:23 AM	Recipe started at 11:26 AM
8/8/2012	11:26:23 AM	Helium valve closed
8/8/2012	11:26:23 AM	H2 valve closed
8/8/2012	11:26:23 AM	BCl3 valve closed
8/8/2012	11:26:23 AM	PH3 valve closed
8/8/2012	11:26:23 AM	SiCl4 pre valve closed
8/8/2012	11:26:23 AM	SiCl4 post valve closed
8/8/2012	11:26:23 AM	Bypass valve closed
8/8/2012	11:26:23 AM	Bubbler valve closed
8/8/2012	11:26:23 AM	Main Vac valve opened
8/8/2012	11:26:23 AM	Helium MFC set to  0.000000
8/8/2012	11:26:23 AM	H2 MFC set to  0.000000
8/8/2012	11:26:23 AM	BCl3 MFC set to  0.000000
8/8/2012	11:26:23 AM	PH3 MFC set to  0.000000
8/8/2012	11:26:23 AM	SiCl4 MFC set to  0.000000
8/8/2012	11:26:23 AM	Bypass solenoid MFC set to  0.000000
8/8/2012	11:26:23 AM	Tube furnace set to 0
8/8/2012	11:26:26 AM	Helium valve closed
8/8/2012	11:26:26 AM	H2 valve closed
8/8/2012	11:26:26 AM	BCl3 valve closed
8/8/2012	11:26:26 AM	PH3 valve closed
8/8/2012	11:26:26 AM	SiCl4 pre valve closed
8/8/2012	11:26:26 AM	SiCl4 post valve closed
8/8/2012	11:26:26 AM	Main Vac valve closed
8/8/2012	11:26:26 AM	Bypass valve closed
8/8/2012	11:26:26 AM	Bubbler valve closed
8/8/2012	11:26:26 AM	Helium MFC set to  0.000000
8/8/2012	11:26:26 AM	H2 MFC set to  0.000000
8/8/2012	11:26:26 AM	BCl3 MFC set to  0.000000
8/8/2012	11:26:26 AM	PH3 MFC set to  0.000000
8/8/2012	11:26:26 AM	SiCl4 MFC set to  0.000000
8/8/2012	11:26:26 AM	Bypass solenoid MFC set to  0.000000
8/8/2012	11:26:26 AM	Tube furnace set to 0
8/8/2012	11:26:29 AM	Helium valve closed
8/8/2012	11:26:29 AM	BCl3 valve closed
8/8/2012	11:26:29 AM	PH3 valve closed
8/8/2012	11:26:29 AM	SiCl4 pre valve closed
8/8/2012	11:26:29 AM	SiCl4 post valve closed
8/8/2012	11:26:29 AM	Main Vac valve closed
8/8/2012	11:26:29 AM	Bypass valve closed
8/8/2012	11:26:29 AM	Bubbler valve closed
8/8/2012	11:26:29 AM	H2 valve opened
8/8/2012	11:26:29 AM	Helium MFC set to  0.000000
8/8/2012	11:26:29 AM	H2 MFC set to  500.000000
8/8/2012	11:26:29 AM	BCl3 MFC set to  0.000000
8/8/2012	11:26:29 AM	PH3 MFC set to  0.000000
8/8/2012	11:26:29 AM	SiCl4 MFC set to  0.000000
8/8/2012	11:26:29 AM	Bypass solenoid MFC set to  0.000000
8/8/2012	11:26:30 AM	Tube furnace set to 0
8/8/2012	11:27:46 AM	Helium valve closed
8/8/2012	11:27:46 AM	BCl3 valve closed
8/8/2012	11:27:46 AM	PH3 valve closed
8/8/2012	11:27:46 AM	SiCl4 pre valve closed
8/8/2012	11:27:46 AM	SiCl4 post valve closed
8/8/2012	11:27:46 AM	Main Vac valve closed
8/8/2012	11:27:46 AM	Bypass valve closed
8/8/2012	11:27:46 AM	H2 valve opened
8/8/2012	11:27:46 AM	Bubbler valve opened
8/8/2012	11:27:46 AM	Helium MFC set to  0.000000
8/8/2012	11:27:46 AM	H2 MFC set to  500.000000
8/8/2012	11:27:46 AM	BCl3 MFC set to  0.000000
8/8/2012	11:27:46 AM	PH3 MFC set to  0.000000
8/8/2012	11:27:46 AM	SiCl4 MFC set to  0.000000
8/8/2012	11:27:46 AM	Bypass solenoid MFC set to  0.000000
8/8/2012	11:27:46 AM	Tube furnace set to 0
8/8/2012	11:27:47 AM	Helium valve closed
8/8/2012	11:27:47 AM	BCl3 valve closed
8/8/2012	11:27:47 AM	PH3 valve closed
8/8/2012	11:27:47 AM	SiCl4 pre valve closed
8/8/2012	11:27:47 AM	SiCl4 post valve closed
8/8/2012	11:27:47 AM	Main Vac valve closed
8/8/2012	11:27:47 AM	Bypass valve closed
8/8/2012	11:27:47 AM	H2 valve opened
8/8/2012	11:27:47 AM	Bubbler valve opened
8/8/2012	11:27:47 AM	Helium MFC set to  0.000000
8/8/2012	11:27:47 AM	H2 MFC set to  500.000000
8/8/2012	11:27:47 AM	BCl3 MFC set to  0.000000
8/8/2012	11:27:47 AM	PH3 MFC set to  0.000000
8/8/2012	11:27:47 AM	SiCl4 MFC set to  0.000000
8/8/2012	11:27:47 AM	Bypass solenoid MFC set to  0.000000
8/8/2012	11:27:47 AM	Tube furnace set to 1000
8/8/2012	11:52:47 AM	Helium valve closed
8/8/2012	11:52:47 AM	PH3 valve closed
8/8/2012	11:52:47 AM	Main Vac valve closed
8/8/2012	11:52:47 AM	Bypass valve closed
8/8/2012	11:52:47 AM	H2 valve opened
8/8/2012	11:52:47 AM	BCl3 valve opened
8/8/2012	11:52:47 AM	SiCl4 pre valve opened
8/8/2012	11:52:47 AM	SiCl4 post valve opened
8/8/2012	11:52:47 AM	Bubbler valve opened
8/8/2012	11:52:47 AM	Helium MFC set to  0.000000
8/8/2012	11:52:47 AM	H2 MFC set to  430.000000
8/8/2012	11:52:47 AM	BCl3 MFC set to  20.000000
8/8/2012	11:52:47 AM	PH3 MFC set to  0.000000
8/8/2012	11:52:47 AM	SiCl4 MFC set to  50.000000
8/8/2012	11:52:47 AM	Bypass solenoid MFC set to  0.000000
8/8/2012	11:52:47 AM	Tube furnace set to 1000
8/8/2012	12:27:47 PM	Helium valve closed
8/8/2012	12:27:47 PM	BCl3 valve closed
8/8/2012	12:27:47 PM	PH3 valve closed
8/8/2012	12:27:47 PM	SiCl4 pre valve closed
8/8/2012	12:27:47 PM	SiCl4 post valve closed
8/8/2012	12:27:47 PM	Main Vac valve closed
8/8/2012	12:27:47 PM	Bypass valve closed
8/8/2012	12:27:47 PM	H2 valve opened
8/8/2012	12:27:47 PM	Bubbler valve opened
8/8/2012	12:27:47 PM	Helium MFC set to  0.000000
8/8/2012	12:27:47 PM	H2 MFC set to  500.000000
8/8/2012	12:27:47 PM	BCl3 MFC set to  0.000000
8/8/2012	12:27:47 PM	PH3 MFC set to  0.000000
8/8/2012	12:27:47 PM	SiCl4 MFC set to  0.000000
8/8/2012	12:27:47 PM	Bypass solenoid MFC set to  0.000000
8/8/2012	12:27:47 PM	Tube furnace set to 750
8/8/2012	12:42:47 PM	H2 valve closed
8/8/2012	12:42:47 PM	BCl3 valve closed
8/8/2012	12:42:47 PM	PH3 valve closed
8/8/2012	12:42:47 PM	SiCl4 pre valve closed
8/8/2012	12:42:47 PM	SiCl4 post valve closed
8/8/2012	12:42:47 PM	Main Vac valve closed
8/8/2012	12:42:47 PM	Bypass valve closed
8/8/2012	12:42:47 PM	Helium valve opened
8/8/2012	12:42:47 PM	Bubbler valve opened
8/8/2012	12:42:47 PM	Helium MFC set to  500.000000
8/8/2012	12:42:47 PM	H2 MFC set to  0.000000
8/8/2012	12:42:47 PM	BCl3 MFC set to  0.000000
8/8/2012	12:42:47 PM	PH3 MFC set to  0.000000
8/8/2012	12:42:47 PM	SiCl4 MFC set to  0.000000
8/8/2012	12:42:47 PM	Bypass solenoid MFC set to  0.000000
8/8/2012	12:42:48 PM	Tube furnace set to 0
8/8/2012	1:02:26 PM	Helium valve closed
8/8/2012	1:02:26 PM	H2 valve closed
8/8/2012	1:02:26 PM	BCl3 valve closed
8/8/2012	1:02:26 PM	PH3 valve closed
8/8/2012	1:02:26 PM	SiCl4 pre valve closed
8/8/2012	1:02:26 PM	SiCl4 post valve closed
8/8/2012	1:02:26 PM	Main Vac valve closed
8/8/2012	1:02:26 PM	Bypass valve closed
8/8/2012	1:02:26 PM	Bubbler valve closed
8/8/2012	1:02:26 PM	Helium MFC set to  0.000000
8/8/2012	1:02:26 PM	H2 MFC set to  0.000000
8/8/2012	1:02:26 PM	BCl3 MFC set to  0.000000
8/8/2012	1:02:26 PM	PH3 MFC set to  0.000000
8/8/2012	1:02:26 PM	SiCl4 MFC set to  0.000000
8/8/2012	1:02:26 PM	Bypass solenoid MFC set to  0.000000
8/8/2012	1:02:26 PM	Tube furnace set to 0
8/8/2012	1:03:46 PM	Helium valve closed
8/8/2012	1:03:46 PM	H2 valve closed
8/8/2012	1:03:46 PM	BCl3 valve closed
8/8/2012	1:03:46 PM	PH3 valve closed
8/8/2012	1:03:46 PM	SiCl4 pre valve closed
8/8/2012	1:03:46 PM	SiCl4 post valve closed
8/8/2012	1:03:46 PM	Main Vac valve closed
8/8/2012	1:03:46 PM	Bubbler valve closed
8/8/2012	1:03:46 PM	Bypass valve opened
8/8/2012	1:03:46 PM	Helium MFC set to  0.000000
8/8/2012	1:03:46 PM	H2 MFC set to  0.000000
8/8/2012	1:03:46 PM	BCl3 MFC set to  0.000000
8/8/2012	1:03:46 PM	PH3 MFC set to  0.000000
8/8/2012	1:03:46 PM	SiCl4 MFC set to  0.000000
8/8/2012	1:03:46 PM	Bypass solenoid MFC set to  0.000000
8/8/2012	1:03:47 PM	Tube furnace set to 0
8/8/2012	1:04:50 PM	Helium valve closed
8/8/2012	1:04:50 PM	H2 valve closed
8/8/2012	1:04:50 PM	BCl3 valve closed
8/8/2012	1:04:50 PM	PH3 valve closed
8/8/2012	1:04:50 PM	SiCl4 pre valve closed
8/8/2012	1:04:50 PM	SiCl4 post valve closed
8/8/2012	1:04:50 PM	Main Vac valve closed
8/8/2012	1:04:50 PM	Bubbler valve closed
8/8/2012	1:04:50 PM	Bypass valve opened
8/8/2012	1:04:50 PM	Helium MFC set to  0.000000
8/8/2012	1:04:50 PM	H2 MFC set to  0.000000
8/8/2012	1:04:50 PM	BCl3 MFC set to  0.000000
8/8/2012	1:04:50 PM	PH3 MFC set to  0.000000
8/8/2012	1:04:50 PM	SiCl4 MFC set to  0.000000
8/8/2012	1:04:50 PM	Bypass solenoid MFC set to  0.000000
8/8/2012	1:04:50 PM	Tube furnace set to 0
8/8/2012	1:05:50 PM	Helium valve closed
8/8/2012	1:05:50 PM	H2 valve closed
8/8/2012	1:05:50 PM	BCl3 valve closed
8/8/2012	1:05:50 PM	PH3 valve closed
8/8/2012	1:05:50 PM	SiCl4 pre valve closed
8/8/2012	1:05:50 PM	SiCl4 post valve closed
8/8/2012	1:05:50 PM	Bypass valve closed
8/8/2012	1:05:50 PM	Bubbler valve closed
8/8/2012	1:05:50 PM	Main Vac valve opened
8/8/2012	1:05:50 PM	Helium MFC set to  0.000000
8/8/2012	1:05:50 PM	H2 MFC set to  0.000000
8/8/2012	1:05:50 PM	BCl3 MFC set to  0.000000
8/8/2012	1:05:50 PM	PH3 MFC set to  0.000000
8/8/2012	1:05:50 PM	SiCl4 MFC set to  0.000000
8/8/2012	1:05:50 PM	Bypass solenoid MFC set to  0.000000
8/8/2012	1:05:50 PM	Tube furnace set to 0
8/8/2012	1:08:24 PM	Run finished at 1:08 PM
8/8/2012	1:08:26 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/8/2012	1:08:27 PM	Recipe started at 1:08 PM
8/8/2012	1:08:27 PM	Helium valve closed
8/8/2012	1:08:27 PM	H2 valve closed
8/8/2012	1:08:27 PM	BCl3 valve closed
8/8/2012	1:08:27 PM	PH3 valve closed
8/8/2012	1:08:27 PM	SiCl4 pre valve closed
8/8/2012	1:08:27 PM	SiCl4 post valve closed
8/8/2012	1:08:27 PM	Main Vac valve closed
8/8/2012	1:08:27 PM	Bypass valve closed
8/8/2012	1:08:27 PM	Bubbler valve closed
8/8/2012	1:08:27 PM	Helium MFC set to  0.000000
8/8/2012	1:08:27 PM	H2 MFC set to  0.000000
8/8/2012	1:08:27 PM	BCl3 MFC set to  0.000000
8/8/2012	1:08:27 PM	PH3 MFC set to  0.000000
8/8/2012	1:08:27 PM	SiCl4 MFC set to  0.000000
8/8/2012	1:08:27 PM	Bypass solenoid MFC set to  0.000000
8/8/2012	1:08:27 PM	Tube furnace set to 0
8/8/2012	1:08:30 PM	H2 valve closed
8/8/2012	1:08:30 PM	BCl3 valve closed
8/8/2012	1:08:30 PM	PH3 valve closed
8/8/2012	1:08:30 PM	SiCl4 pre valve closed
8/8/2012	1:08:30 PM	SiCl4 post valve closed
8/8/2012	1:08:30 PM	Main Vac valve closed
8/8/2012	1:08:30 PM	Bypass valve closed
8/8/2012	1:08:30 PM	Bubbler valve closed
8/8/2012	1:08:30 PM	Helium valve opened
8/8/2012	1:08:30 PM	Helium MFC set to  500.000000
8/8/2012	1:08:30 PM	H2 MFC set to  0.000000
8/8/2012	1:08:30 PM	BCl3 MFC set to  0.000000
8/8/2012	1:08:30 PM	PH3 MFC set to  0.000000
8/8/2012	1:08:30 PM	SiCl4 MFC set to  0.000000
8/8/2012	1:08:30 PM	Bypass solenoid MFC set to  0.000000
8/8/2012	1:08:31 PM	Tube furnace set to 0
8/8/2012	1:09:40 PM	Helium valve closed
8/8/2012	1:09:40 PM	H2 valve closed
8/8/2012	1:09:40 PM	BCl3 valve closed
8/8/2012	1:09:40 PM	PH3 valve closed
8/8/2012	1:09:40 PM	SiCl4 pre valve closed
8/8/2012	1:09:40 PM	SiCl4 post valve closed
8/8/2012	1:09:40 PM	Main Vac valve closed
8/8/2012	1:09:40 PM	Bypass valve closed
8/8/2012	1:09:40 PM	Bubbler valve closed
8/8/2012	1:09:40 PM	Helium MFC set to  0.000000
8/8/2012	1:09:40 PM	H2 MFC set to  0.000000
8/8/2012	1:09:40 PM	BCl3 MFC set to  0.000000
8/8/2012	1:09:40 PM	PH3 MFC set to  0.000000
8/8/2012	1:09:40 PM	SiCl4 MFC set to  0.000000
8/8/2012	1:09:40 PM	Bypass solenoid MFC set to  0.000000
8/8/2012	1:09:40 PM	Tube furnace set to 0
8/8/2012	1:09:41 PM	Run finished at 1:09 PM
8/8/2012	1:09:41 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/8/2012	1:15:51 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/8/2012	1:15:51 PM	Recipe started at 1:15 PM
8/8/2012	1:15:51 PM	Helium valve closed
8/8/2012	1:15:51 PM	H2 valve closed
8/8/2012	1:15:51 PM	BCl3 valve closed
8/8/2012	1:15:51 PM	PH3 valve closed
8/8/2012	1:15:51 PM	SiCl4 pre valve closed
8/8/2012	1:15:51 PM	SiCl4 post valve closed
8/8/2012	1:15:51 PM	Main Vac valve closed
8/8/2012	1:15:51 PM	Bubbler valve closed
8/8/2012	1:15:51 PM	Bypass valve opened
8/8/2012	1:15:51 PM	Helium MFC set to  0.000000
8/8/2012	1:15:52 PM	H2 MFC set to  0.000000
8/8/2012	1:15:52 PM	BCl3 MFC set to  0.000000
8/8/2012	1:15:52 PM	PH3 MFC set to  0.000000
8/8/2012	1:15:52 PM	SiCl4 MFC set to  0.000000
8/8/2012	1:15:52 PM	Bypass solenoid MFC set to  0.000000
8/8/2012	1:15:52 PM	Tube furnace set to 0
8/8/2012	1:17:19 PM	Helium valve closed
8/8/2012	1:17:19 PM	H2 valve closed
8/8/2012	1:17:19 PM	BCl3 valve closed
8/8/2012	1:17:19 PM	PH3 valve closed
8/8/2012	1:17:19 PM	SiCl4 pre valve closed
8/8/2012	1:17:19 PM	SiCl4 post valve closed
8/8/2012	1:17:19 PM	Main Vac valve closed
8/8/2012	1:17:19 PM	Bubbler valve closed
8/8/2012	1:17:19 PM	Bypass valve opened
8/8/2012	1:17:19 PM	Helium MFC set to  0.000000
8/8/2012	1:17:19 PM	H2 MFC set to  0.000000
8/8/2012	1:17:19 PM	BCl3 MFC set to  0.000000
8/8/2012	1:17:19 PM	PH3 MFC set to  0.000000
8/8/2012	1:17:19 PM	SiCl4 MFC set to  0.000000
8/8/2012	1:17:19 PM	Bypass solenoid MFC set to  0.000000
8/8/2012	1:17:19 PM	Tube furnace set to 0
8/8/2012	1:18:19 PM	Helium valve closed
8/8/2012	1:18:19 PM	H2 valve closed
8/8/2012	1:18:19 PM	BCl3 valve closed
8/8/2012	1:18:19 PM	PH3 valve closed
8/8/2012	1:18:19 PM	SiCl4 pre valve closed
8/8/2012	1:18:19 PM	SiCl4 post valve closed
8/8/2012	1:18:19 PM	Bypass valve closed
8/8/2012	1:18:19 PM	Bubbler valve closed
8/8/2012	1:18:19 PM	Main Vac valve opened
8/8/2012	1:18:19 PM	Helium MFC set to  0.000000
8/8/2012	1:18:19 PM	H2 MFC set to  0.000000
8/8/2012	1:18:19 PM	BCl3 MFC set to  0.000000
8/8/2012	1:18:19 PM	PH3 MFC set to  0.000000
8/8/2012	1:18:19 PM	SiCl4 MFC set to  0.000000
8/8/2012	1:18:19 PM	Bypass solenoid MFC set to  0.000000
8/8/2012	1:18:19 PM	Tube furnace set to 0
8/8/2012	1:18:20 PM	Run finished at 1:18 PM
8/8/2012	1:18:20 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/8/2012	2:50:29 PM	Main Vac valve closed
8/8/2012	2:50:43 PM	Main Vac valve opened
8/8/2012	3:03:01 PM	Main Vac valve closed
8/8/2012	3:03:15 PM	Main Vac valve opened
8/8/2012	3:04:05 PM	Recipe started at 3:04 PM
8/8/2012	3:04:05 PM	Helium valve closed
8/8/2012	3:04:05 PM	H2 valve closed
8/8/2012	3:04:05 PM	BCl3 valve closed
8/8/2012	3:04:05 PM	PH3 valve closed
8/8/2012	3:04:05 PM	SiCl4 pre valve closed
8/8/2012	3:04:05 PM	SiCl4 post valve closed
8/8/2012	3:04:05 PM	Bypass valve closed
8/8/2012	3:04:05 PM	Bubbler valve closed
8/8/2012	3:04:05 PM	Main Vac valve opened
8/8/2012	3:04:05 PM	Helium MFC set to  0.000000
8/8/2012	3:04:05 PM	H2 MFC set to  0.000000
8/8/2012	3:04:05 PM	BCl3 MFC set to  0.000000
8/8/2012	3:04:05 PM	PH3 MFC set to  0.000000
8/8/2012	3:04:05 PM	SiCl4 MFC set to  0.000000
8/8/2012	3:04:05 PM	Bypass solenoid MFC set to  0.000000
8/8/2012	3:04:06 PM	Tube furnace set to 0
8/8/2012	3:04:09 PM	Helium valve closed
8/8/2012	3:04:09 PM	H2 valve closed
8/8/2012	3:04:09 PM	BCl3 valve closed
8/8/2012	3:04:09 PM	PH3 valve closed
8/8/2012	3:04:09 PM	SiCl4 pre valve closed
8/8/2012	3:04:09 PM	SiCl4 post valve closed
8/8/2012	3:04:09 PM	Main Vac valve closed
8/8/2012	3:04:09 PM	Bypass valve closed
8/8/2012	3:04:09 PM	Bubbler valve closed
8/8/2012	3:04:09 PM	Helium MFC set to  0.000000
8/8/2012	3:04:09 PM	H2 MFC set to  0.000000
8/8/2012	3:04:09 PM	BCl3 MFC set to  0.000000
8/8/2012	3:04:09 PM	PH3 MFC set to  0.000000
8/8/2012	3:04:09 PM	SiCl4 MFC set to  0.000000
8/8/2012	3:04:09 PM	Bypass solenoid MFC set to  0.000000
8/8/2012	3:04:09 PM	Tube furnace set to 0
8/8/2012	3:04:12 PM	Helium valve closed
8/8/2012	3:04:12 PM	BCl3 valve closed
8/8/2012	3:04:12 PM	PH3 valve closed
8/8/2012	3:04:12 PM	SiCl4 pre valve closed
8/8/2012	3:04:12 PM	SiCl4 post valve closed
8/8/2012	3:04:12 PM	Main Vac valve closed
8/8/2012	3:04:12 PM	Bypass valve closed
8/8/2012	3:04:12 PM	Bubbler valve closed
8/8/2012	3:04:12 PM	H2 valve opened
8/8/2012	3:04:12 PM	Helium MFC set to  0.000000
8/8/2012	3:04:12 PM	H2 MFC set to  500.000000
8/8/2012	3:04:12 PM	BCl3 MFC set to  0.000000
8/8/2012	3:04:12 PM	PH3 MFC set to  0.000000
8/8/2012	3:04:12 PM	SiCl4 MFC set to  0.000000
8/8/2012	3:04:12 PM	Bypass solenoid MFC set to  0.000000
8/8/2012	3:04:12 PM	Tube furnace set to 0
8/8/2012	3:05:25 PM	Helium valve closed
8/8/2012	3:05:25 PM	BCl3 valve closed
8/8/2012	3:05:26 PM	PH3 valve closed
8/8/2012	3:05:26 PM	SiCl4 pre valve closed
8/8/2012	3:05:26 PM	SiCl4 post valve closed
8/8/2012	3:05:26 PM	Main Vac valve closed
8/8/2012	3:05:26 PM	Bypass valve closed
8/8/2012	3:05:26 PM	H2 valve opened
8/8/2012	3:05:26 PM	Bubbler valve opened
8/8/2012	3:05:26 PM	Helium MFC set to  0.000000
8/8/2012	3:05:26 PM	H2 MFC set to  500.000000
8/8/2012	3:05:26 PM	BCl3 MFC set to  0.000000
8/8/2012	3:05:26 PM	PH3 MFC set to  0.000000
8/8/2012	3:05:26 PM	SiCl4 MFC set to  0.000000
8/8/2012	3:05:26 PM	Bypass solenoid MFC set to  0.000000
8/8/2012	3:05:26 PM	Tube furnace set to 0
8/8/2012	3:05:27 PM	Helium valve closed
8/8/2012	3:05:27 PM	BCl3 valve closed
8/8/2012	3:05:27 PM	PH3 valve closed
8/8/2012	3:05:27 PM	SiCl4 pre valve closed
8/8/2012	3:05:27 PM	SiCl4 post valve closed
8/8/2012	3:05:27 PM	Main Vac valve closed
8/8/2012	3:05:27 PM	Bypass valve closed
8/8/2012	3:05:27 PM	H2 valve opened
8/8/2012	3:05:27 PM	Bubbler valve opened
8/8/2012	3:05:27 PM	Helium MFC set to  0.000000
8/8/2012	3:05:27 PM	H2 MFC set to  500.000000
8/8/2012	3:05:27 PM	BCl3 MFC set to  0.000000
8/8/2012	3:05:27 PM	PH3 MFC set to  0.000000
8/8/2012	3:05:27 PM	SiCl4 MFC set to  0.000000
8/8/2012	3:05:27 PM	Bypass solenoid MFC set to  0.000000
8/8/2012	3:05:27 PM	Tube furnace set to 1000
8/8/2012	3:30:27 PM	Helium valve closed
8/8/2012	3:30:27 PM	PH3 valve closed
8/8/2012	3:30:27 PM	Main Vac valve closed
8/8/2012	3:30:27 PM	Bypass valve closed
8/8/2012	3:30:27 PM	H2 valve opened
8/8/2012	3:30:27 PM	BCl3 valve opened
8/8/2012	3:30:27 PM	SiCl4 pre valve opened
8/8/2012	3:30:27 PM	SiCl4 post valve opened
8/8/2012	3:30:27 PM	Bubbler valve opened
8/8/2012	3:30:27 PM	Helium MFC set to  0.000000
8/8/2012	3:30:27 PM	H2 MFC set to  430.000000
8/8/2012	3:30:27 PM	BCl3 MFC set to  20.000000
8/8/2012	3:30:27 PM	PH3 MFC set to  0.000000
8/8/2012	3:30:27 PM	SiCl4 MFC set to  50.000000
8/8/2012	3:30:27 PM	Bypass solenoid MFC set to  0.000000
8/8/2012	3:30:27 PM	Tube furnace set to 1000
8/8/2012	3:32:57 PM	Helium valve closed
8/8/2012	3:32:57 PM	BCl3 valve closed
8/8/2012	3:32:57 PM	PH3 valve closed
8/8/2012	3:32:57 PM	SiCl4 pre valve closed
8/8/2012	3:32:57 PM	SiCl4 post valve closed
8/8/2012	3:32:57 PM	Main Vac valve closed
8/8/2012	3:32:57 PM	Bypass valve closed
8/8/2012	3:32:57 PM	H2 valve opened
8/8/2012	3:32:57 PM	Bubbler valve opened
8/8/2012	3:32:57 PM	Helium MFC set to  0.000000
8/8/2012	3:32:57 PM	H2 MFC set to  500.000000
8/8/2012	3:32:57 PM	BCl3 MFC set to  0.000000
8/8/2012	3:32:57 PM	PH3 MFC set to  0.000000
8/8/2012	3:32:57 PM	SiCl4 MFC set to  0.000000
8/8/2012	3:32:57 PM	Bypass solenoid MFC set to  0.000000
8/8/2012	3:32:57 PM	Tube furnace set to 750
8/8/2012	3:47:57 PM	H2 valve closed
8/8/2012	3:47:57 PM	BCl3 valve closed
8/8/2012	3:47:57 PM	PH3 valve closed
8/8/2012	3:47:57 PM	SiCl4 pre valve closed
8/8/2012	3:47:57 PM	SiCl4 post valve closed
8/8/2012	3:47:57 PM	Main Vac valve closed
8/8/2012	3:47:57 PM	Bypass valve closed
8/8/2012	3:47:57 PM	Helium valve opened
8/8/2012	3:47:57 PM	Bubbler valve opened
8/8/2012	3:47:57 PM	Helium MFC set to  500.000000
8/8/2012	3:47:57 PM	H2 MFC set to  0.000000
8/8/2012	3:47:57 PM	BCl3 MFC set to  0.000000
8/8/2012	3:47:57 PM	PH3 MFC set to  0.000000
8/8/2012	3:47:57 PM	SiCl4 MFC set to  0.000000
8/8/2012	3:47:57 PM	Bypass solenoid MFC set to  0.000000
8/8/2012	3:47:58 PM	Tube furnace set to 0
8/8/2012	4:07:57 PM	Helium valve closed
8/8/2012	4:07:57 PM	H2 valve closed
8/8/2012	4:07:57 PM	BCl3 valve closed
8/8/2012	4:07:57 PM	PH3 valve closed
8/8/2012	4:07:57 PM	SiCl4 pre valve closed
8/8/2012	4:07:57 PM	SiCl4 post valve closed
8/8/2012	4:07:57 PM	Main Vac valve closed
8/8/2012	4:07:57 PM	Bypass valve closed
8/8/2012	4:07:58 PM	Bubbler valve closed
8/8/2012	4:07:58 PM	Helium MFC set to  0.000000
8/8/2012	4:07:58 PM	H2 MFC set to  0.000000
8/8/2012	4:07:58 PM	BCl3 MFC set to  0.000000
8/8/2012	4:07:58 PM	PH3 MFC set to  0.000000
8/8/2012	4:07:58 PM	SiCl4 MFC set to  0.000000
8/8/2012	4:07:58 PM	Bypass solenoid MFC set to  0.000000
8/8/2012	4:07:58 PM	Tube furnace set to 0
8/8/2012	4:11:32 PM	Helium valve closed
8/8/2012	4:11:32 PM	H2 valve closed
8/8/2012	4:11:32 PM	BCl3 valve closed
8/8/2012	4:11:32 PM	PH3 valve closed
8/8/2012	4:11:32 PM	SiCl4 pre valve closed
8/8/2012	4:11:32 PM	SiCl4 post valve closed
8/8/2012	4:11:32 PM	Main Vac valve closed
8/8/2012	4:11:32 PM	Bubbler valve closed
8/8/2012	4:11:32 PM	Bypass valve opened
8/8/2012	4:11:32 PM	Helium MFC set to  0.000000
8/8/2012	4:11:32 PM	H2 MFC set to  0.000000
8/8/2012	4:11:32 PM	BCl3 MFC set to  0.000000
8/8/2012	4:11:32 PM	PH3 MFC set to  0.000000
8/8/2012	4:11:32 PM	SiCl4 MFC set to  0.000000
8/8/2012	4:11:32 PM	Bypass solenoid MFC set to  0.000000
8/8/2012	4:11:32 PM	Tube furnace set to 0
8/8/2012	4:12:36 PM	Helium valve closed
8/8/2012	4:12:36 PM	H2 valve closed
8/8/2012	4:12:36 PM	BCl3 valve closed
8/8/2012	4:12:36 PM	PH3 valve closed
8/8/2012	4:12:36 PM	SiCl4 pre valve closed
8/8/2012	4:12:36 PM	SiCl4 post valve closed
8/8/2012	4:12:36 PM	Main Vac valve closed
8/8/2012	4:12:36 PM	Bubbler valve closed
8/8/2012	4:12:36 PM	Bypass valve opened
8/8/2012	4:12:36 PM	Helium MFC set to  0.000000
8/8/2012	4:12:36 PM	H2 MFC set to  0.000000
8/8/2012	4:12:36 PM	BCl3 MFC set to  0.000000
8/8/2012	4:12:36 PM	PH3 MFC set to  0.000000
8/8/2012	4:12:36 PM	SiCl4 MFC set to  0.000000
8/8/2012	4:12:36 PM	Bypass solenoid MFC set to  0.000000
8/8/2012	4:12:36 PM	Tube furnace set to 0
8/8/2012	4:13:36 PM	Helium valve closed
8/8/2012	4:13:36 PM	H2 valve closed
8/8/2012	4:13:36 PM	BCl3 valve closed
8/8/2012	4:13:36 PM	PH3 valve closed
8/8/2012	4:13:36 PM	SiCl4 pre valve closed
8/8/2012	4:13:36 PM	SiCl4 post valve closed
8/8/2012	4:13:36 PM	Bypass valve closed
8/8/2012	4:13:36 PM	Bubbler valve closed
8/8/2012	4:13:36 PM	Main Vac valve opened
8/8/2012	4:13:36 PM	Helium MFC set to  0.000000
8/8/2012	4:13:36 PM	H2 MFC set to  0.000000
8/8/2012	4:13:36 PM	BCl3 MFC set to  0.000000
8/8/2012	4:13:36 PM	PH3 MFC set to  0.000000
8/8/2012	4:13:36 PM	SiCl4 MFC set to  0.000000
8/8/2012	4:13:36 PM	Bypass solenoid MFC set to  0.000000
8/8/2012	4:13:37 PM	Tube furnace set to 0
8/8/2012	4:15:36 PM	Run finished at 4:15 PM
8/8/2012	4:15:40 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/8/2012	4:15:41 PM	Recipe started at 4:15 PM
8/8/2012	4:15:41 PM	Helium valve closed
8/8/2012	4:15:41 PM	H2 valve closed
8/8/2012	4:15:41 PM	BCl3 valve closed
8/8/2012	4:15:41 PM	PH3 valve closed
8/8/2012	4:15:41 PM	SiCl4 pre valve closed
8/8/2012	4:15:41 PM	SiCl4 post valve closed
8/8/2012	4:15:41 PM	Main Vac valve closed
8/8/2012	4:15:41 PM	Bypass valve closed
8/8/2012	4:15:41 PM	Bubbler valve closed
8/8/2012	4:15:41 PM	Helium MFC set to  0.000000
8/8/2012	4:15:41 PM	H2 MFC set to  0.000000
8/8/2012	4:15:41 PM	BCl3 MFC set to  0.000000
8/8/2012	4:15:41 PM	PH3 MFC set to  0.000000
8/8/2012	4:15:41 PM	SiCl4 MFC set to  0.000000
8/8/2012	4:15:41 PM	Bypass solenoid MFC set to  0.000000
8/8/2012	4:15:41 PM	Tube furnace set to 0
8/8/2012	4:15:44 PM	H2 valve closed
8/8/2012	4:15:44 PM	BCl3 valve closed
8/8/2012	4:15:44 PM	PH3 valve closed
8/8/2012	4:15:44 PM	SiCl4 pre valve closed
8/8/2012	4:15:44 PM	SiCl4 post valve closed
8/8/2012	4:15:44 PM	Main Vac valve closed
8/8/2012	4:15:44 PM	Bypass valve closed
8/8/2012	4:15:44 PM	Bubbler valve closed
8/8/2012	4:15:44 PM	Helium valve opened
8/8/2012	4:15:44 PM	Helium MFC set to  500.000000
8/8/2012	4:15:44 PM	H2 MFC set to  0.000000
8/8/2012	4:15:44 PM	BCl3 MFC set to  0.000000
8/8/2012	4:15:44 PM	PH3 MFC set to  0.000000
8/8/2012	4:15:44 PM	SiCl4 MFC set to  0.000000
8/8/2012	4:15:44 PM	Bypass solenoid MFC set to  0.000000
8/8/2012	4:15:45 PM	Tube furnace set to 0
8/8/2012	4:16:54 PM	Helium valve closed
8/8/2012	4:16:54 PM	H2 valve closed
8/8/2012	4:16:54 PM	BCl3 valve closed
8/8/2012	4:16:54 PM	PH3 valve closed
8/8/2012	4:16:54 PM	SiCl4 pre valve closed
8/8/2012	4:16:54 PM	SiCl4 post valve closed
8/8/2012	4:16:54 PM	Main Vac valve closed
8/8/2012	4:16:54 PM	Bypass valve closed
8/8/2012	4:16:54 PM	Bubbler valve closed
8/8/2012	4:16:54 PM	Helium MFC set to  0.000000
8/8/2012	4:16:54 PM	H2 MFC set to  0.000000
8/8/2012	4:16:54 PM	BCl3 MFC set to  0.000000
8/8/2012	4:16:54 PM	PH3 MFC set to  0.000000
8/8/2012	4:16:54 PM	SiCl4 MFC set to  0.000000
8/8/2012	4:16:54 PM	Bypass solenoid MFC set to  0.000000
8/8/2012	4:16:54 PM	Tube furnace set to 0
8/8/2012	4:16:55 PM	Run finished at 4:16 PM
8/8/2012	4:16:55 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/8/2012	4:20:59 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/8/2012	4:21:00 PM	Recipe started at 4:20 PM
8/8/2012	4:21:00 PM	Helium valve closed
8/8/2012	4:21:00 PM	H2 valve closed
8/8/2012	4:21:00 PM	BCl3 valve closed
8/8/2012	4:21:00 PM	PH3 valve closed
8/8/2012	4:21:00 PM	SiCl4 pre valve closed
8/8/2012	4:21:00 PM	SiCl4 post valve closed
8/8/2012	4:21:00 PM	Main Vac valve closed
8/8/2012	4:21:00 PM	Bubbler valve closed
8/8/2012	4:21:00 PM	Bypass valve opened
8/8/2012	4:21:00 PM	Helium MFC set to  0.000000
8/8/2012	4:21:00 PM	H2 MFC set to  0.000000
8/8/2012	4:21:00 PM	BCl3 MFC set to  0.000000
8/8/2012	4:21:00 PM	PH3 MFC set to  0.000000
8/8/2012	4:21:00 PM	SiCl4 MFC set to  0.000000
8/8/2012	4:21:00 PM	Bypass solenoid MFC set to  0.000000
8/8/2012	4:21:00 PM	Tube furnace set to 0
8/8/2012	4:22:22 PM	Helium valve closed
8/8/2012	4:22:22 PM	H2 valve closed
8/8/2012	4:22:22 PM	BCl3 valve closed
8/8/2012	4:22:22 PM	PH3 valve closed
8/8/2012	4:22:22 PM	SiCl4 pre valve closed
8/8/2012	4:22:22 PM	SiCl4 post valve closed
8/8/2012	4:22:22 PM	Main Vac valve closed
8/8/2012	4:22:22 PM	Bubbler valve closed
8/8/2012	4:22:22 PM	Bypass valve opened
8/8/2012	4:22:22 PM	Helium MFC set to  0.000000
8/8/2012	4:22:22 PM	H2 MFC set to  0.000000
8/8/2012	4:22:22 PM	BCl3 MFC set to  0.000000
8/8/2012	4:22:22 PM	PH3 MFC set to  0.000000
8/8/2012	4:22:22 PM	SiCl4 MFC set to  0.000000
8/8/2012	4:22:22 PM	Bypass solenoid MFC set to  0.000000
8/8/2012	4:22:22 PM	Tube furnace set to 0
8/8/2012	4:23:22 PM	Helium valve closed
8/8/2012	4:23:23 PM	H2 valve closed
8/8/2012	4:23:23 PM	BCl3 valve closed
8/8/2012	4:23:23 PM	PH3 valve closed
8/8/2012	4:23:23 PM	SiCl4 pre valve closed
8/8/2012	4:23:23 PM	SiCl4 post valve closed
8/8/2012	4:23:23 PM	Bypass valve closed
8/8/2012	4:23:23 PM	Bubbler valve closed
8/8/2012	4:23:23 PM	Main Vac valve opened
8/8/2012	4:23:23 PM	Helium MFC set to  0.000000
8/8/2012	4:23:23 PM	H2 MFC set to  0.000000
8/8/2012	4:23:23 PM	BCl3 MFC set to  0.000000
8/8/2012	4:23:23 PM	PH3 MFC set to  0.000000
8/8/2012	4:23:23 PM	SiCl4 MFC set to  0.000000
8/8/2012	4:23:23 PM	Bypass solenoid MFC set to  0.000000
8/8/2012	4:23:23 PM	Tube furnace set to 0
8/8/2012	4:23:24 PM	Run finished at 4:23 PM
8/8/2012	4:23:24 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/8/2012	4:24:32 PM	Recipe started at 4:24 PM
8/8/2012	4:24:32 PM	Helium valve closed
8/8/2012	4:24:32 PM	H2 valve closed
8/8/2012	4:24:32 PM	BCl3 valve closed
8/8/2012	4:24:32 PM	PH3 valve closed
8/8/2012	4:24:32 PM	SiCl4 pre valve closed
8/8/2012	4:24:32 PM	SiCl4 post valve closed
8/8/2012	4:24:32 PM	Bypass valve closed
8/8/2012	4:24:32 PM	Bubbler valve closed
8/8/2012	4:24:32 PM	Main Vac valve opened
8/8/2012	4:24:32 PM	Helium MFC set to  0.000000
8/8/2012	4:24:32 PM	H2 MFC set to  0.000000
8/8/2012	4:24:32 PM	BCl3 MFC set to  0.000000
8/8/2012	4:24:32 PM	PH3 MFC set to  0.000000
8/8/2012	4:24:32 PM	SiCl4 MFC set to  0.000000
8/8/2012	4:24:32 PM	Bypass solenoid MFC set to  0.000000
8/8/2012	4:24:32 PM	Tube furnace set to 0
8/8/2012	7:24:32 PM	Helium valve closed
8/8/2012	7:24:32 PM	H2 valve closed
8/8/2012	7:24:32 PM	BCl3 valve closed
8/8/2012	7:24:32 PM	PH3 valve closed
8/8/2012	7:24:32 PM	SiCl4 pre valve closed
8/8/2012	7:24:32 PM	SiCl4 post valve closed
8/8/2012	7:24:32 PM	Main Vac valve closed
8/8/2012	7:24:32 PM	Bypass valve closed
8/8/2012	7:24:32 PM	Bubbler valve closed
8/8/2012	7:24:32 PM	Helium MFC set to  0.000000
8/8/2012	7:24:32 PM	H2 MFC set to  0.000000
8/8/2012	7:24:32 PM	BCl3 MFC set to  0.000000
8/8/2012	7:24:32 PM	PH3 MFC set to  0.000000
8/8/2012	7:24:32 PM	SiCl4 MFC set to  0.000000
8/8/2012	7:24:32 PM	Bypass solenoid MFC set to  0.000000
8/8/2012	7:24:32 PM	Tube furnace set to 0
8/8/2012	7:24:35 PM	Helium valve closed
8/8/2012	7:24:35 PM	BCl3 valve closed
8/8/2012	7:24:35 PM	PH3 valve closed
8/8/2012	7:24:35 PM	SiCl4 pre valve closed
8/8/2012	7:24:35 PM	SiCl4 post valve closed
8/8/2012	7:24:35 PM	Main Vac valve closed
8/8/2012	7:24:35 PM	Bypass valve closed
8/8/2012	7:24:35 PM	Bubbler valve closed
8/8/2012	7:24:35 PM	H2 valve opened
8/8/2012	7:24:35 PM	Helium MFC set to  0.000000
8/8/2012	7:24:35 PM	H2 MFC set to  500.000000
8/8/2012	7:24:35 PM	BCl3 MFC set to  0.000000
8/8/2012	7:24:35 PM	PH3 MFC set to  0.000000
8/8/2012	7:24:35 PM	SiCl4 MFC set to  0.000000
8/8/2012	7:24:35 PM	Bypass solenoid MFC set to  0.000000
8/8/2012	7:24:35 PM	Tube furnace set to 0
8/8/2012	7:25:50 PM	Helium valve closed
8/8/2012	7:25:50 PM	BCl3 valve closed
8/8/2012	7:25:50 PM	PH3 valve closed
8/8/2012	7:25:50 PM	SiCl4 pre valve closed
8/8/2012	7:25:50 PM	SiCl4 post valve closed
8/8/2012	7:25:50 PM	Main Vac valve closed
8/8/2012	7:25:50 PM	Bypass valve closed
8/8/2012	7:25:50 PM	H2 valve opened
8/8/2012	7:25:50 PM	Bubbler valve opened
8/8/2012	7:25:50 PM	Helium MFC set to  0.000000
8/8/2012	7:25:50 PM	H2 MFC set to  500.000000
8/8/2012	7:25:50 PM	BCl3 MFC set to  0.000000
8/8/2012	7:25:50 PM	PH3 MFC set to  0.000000
8/8/2012	7:25:50 PM	SiCl4 MFC set to  0.000000
8/8/2012	7:25:50 PM	Bypass solenoid MFC set to  0.000000
8/8/2012	7:25:50 PM	Tube furnace set to 0
8/8/2012	7:25:51 PM	Helium valve closed
8/8/2012	7:25:51 PM	BCl3 valve closed
8/8/2012	7:25:51 PM	PH3 valve closed
8/8/2012	7:25:51 PM	SiCl4 pre valve closed
8/8/2012	7:25:51 PM	SiCl4 post valve closed
8/8/2012	7:25:51 PM	Main Vac valve closed
8/8/2012	7:25:51 PM	Bypass valve closed
8/8/2012	7:25:51 PM	H2 valve opened
8/8/2012	7:25:51 PM	Bubbler valve opened
8/8/2012	7:25:51 PM	Helium MFC set to  0.000000
8/8/2012	7:25:51 PM	H2 MFC set to  500.000000
8/8/2012	7:25:51 PM	BCl3 MFC set to  0.000000
8/8/2012	7:25:51 PM	PH3 MFC set to  0.000000
8/8/2012	7:25:51 PM	SiCl4 MFC set to  0.000000
8/8/2012	7:25:51 PM	Bypass solenoid MFC set to  0.000000
8/8/2012	7:25:52 PM	Tube furnace set to 1000
8/8/2012	7:50:52 PM	Helium valve closed
8/8/2012	7:50:52 PM	PH3 valve closed
8/8/2012	7:50:52 PM	Main Vac valve closed
8/8/2012	7:50:52 PM	Bypass valve closed
8/8/2012	7:50:52 PM	H2 valve opened
8/8/2012	7:50:52 PM	BCl3 valve opened
8/8/2012	7:50:52 PM	SiCl4 pre valve opened
8/8/2012	7:50:52 PM	SiCl4 post valve opened
8/8/2012	7:50:52 PM	Bubbler valve opened
8/8/2012	7:50:52 PM	Helium MFC set to  0.000000
8/8/2012	7:50:52 PM	H2 MFC set to  430.000000
8/8/2012	7:50:52 PM	BCl3 MFC set to  20.000000
8/8/2012	7:50:52 PM	PH3 MFC set to  0.000000
8/8/2012	7:50:52 PM	SiCl4 MFC set to  50.000000
8/8/2012	7:50:52 PM	Bypass solenoid MFC set to  0.000000
8/8/2012	7:50:52 PM	Tube furnace set to 1000
8/8/2012	8:18:52 PM	Helium valve closed
8/8/2012	8:18:52 PM	BCl3 valve closed
8/8/2012	8:18:52 PM	PH3 valve closed
8/8/2012	8:18:52 PM	SiCl4 pre valve closed
8/8/2012	8:18:52 PM	SiCl4 post valve closed
8/8/2012	8:18:52 PM	Main Vac valve closed
8/8/2012	8:18:52 PM	Bypass valve closed
8/8/2012	8:18:52 PM	H2 valve opened
8/8/2012	8:18:52 PM	Bubbler valve opened
8/8/2012	8:18:52 PM	Helium MFC set to  0.000000
8/8/2012	8:18:52 PM	H2 MFC set to  500.000000
8/8/2012	8:18:52 PM	BCl3 MFC set to  0.000000
8/8/2012	8:18:52 PM	PH3 MFC set to  0.000000
8/8/2012	8:18:52 PM	SiCl4 MFC set to  0.000000
8/8/2012	8:18:52 PM	Bypass solenoid MFC set to  0.000000
8/8/2012	8:18:52 PM	Tube furnace set to 750
8/8/2012	8:33:52 PM	H2 valve closed
8/8/2012	8:33:52 PM	BCl3 valve closed
8/8/2012	8:33:52 PM	PH3 valve closed
8/8/2012	8:33:52 PM	SiCl4 pre valve closed
8/8/2012	8:33:52 PM	SiCl4 post valve closed
8/8/2012	8:33:52 PM	Main Vac valve closed
8/8/2012	8:33:52 PM	Bypass valve closed
8/8/2012	8:33:52 PM	Helium valve opened
8/8/2012	8:33:52 PM	Bubbler valve opened
8/8/2012	8:33:52 PM	Helium MFC set to  500.000000
8/8/2012	8:33:52 PM	H2 MFC set to  0.000000
8/8/2012	8:33:52 PM	BCl3 MFC set to  0.000000
8/8/2012	8:33:52 PM	PH3 MFC set to  0.000000
8/8/2012	8:33:52 PM	SiCl4 MFC set to  0.000000
8/8/2012	8:33:52 PM	Bypass solenoid MFC set to  0.000000
8/8/2012	8:33:52 PM	Tube furnace set to 0
8/8/2012	8:53:52 PM	Helium valve closed
8/8/2012	8:53:52 PM	H2 valve closed
8/8/2012	8:53:52 PM	BCl3 valve closed
8/8/2012	8:53:52 PM	PH3 valve closed
8/8/2012	8:53:52 PM	SiCl4 pre valve closed
8/8/2012	8:53:52 PM	SiCl4 post valve closed
8/8/2012	8:53:52 PM	Main Vac valve closed
8/8/2012	8:53:52 PM	Bypass valve closed
8/8/2012	8:53:52 PM	Bubbler valve closed
8/8/2012	8:53:52 PM	Helium MFC set to  0.000000
8/8/2012	8:53:52 PM	H2 MFC set to  0.000000
8/8/2012	8:53:52 PM	BCl3 MFC set to  0.000000
8/8/2012	8:53:52 PM	PH3 MFC set to  0.000000
8/8/2012	8:53:52 PM	SiCl4 MFC set to  0.000000
8/8/2012	8:53:52 PM	Bypass solenoid MFC set to  0.000000
8/8/2012	8:53:52 PM	Tube furnace set to 0
8/8/2012	9:13:52 PM	Helium valve closed
8/8/2012	9:13:52 PM	H2 valve closed
8/8/2012	9:13:52 PM	BCl3 valve closed
8/8/2012	9:13:52 PM	PH3 valve closed
8/8/2012	9:13:52 PM	SiCl4 pre valve closed
8/8/2012	9:13:52 PM	SiCl4 post valve closed
8/8/2012	9:13:52 PM	Main Vac valve closed
8/8/2012	9:13:52 PM	Bubbler valve closed
8/8/2012	9:13:52 PM	Bypass valve opened
8/8/2012	9:13:52 PM	Helium MFC set to  0.000000
8/8/2012	9:13:52 PM	H2 MFC set to  0.000000
8/8/2012	9:13:52 PM	BCl3 MFC set to  0.000000
8/8/2012	9:13:52 PM	PH3 MFC set to  0.000000
8/8/2012	9:13:52 PM	SiCl4 MFC set to  0.000000
8/8/2012	9:13:52 PM	Bypass solenoid MFC set to  0.000000
8/8/2012	9:13:52 PM	Tube furnace set to 0
8/8/2012	9:14:50 PM	Helium valve closed
8/8/2012	9:14:50 PM	H2 valve closed
8/8/2012	9:14:50 PM	BCl3 valve closed
8/8/2012	9:14:51 PM	PH3 valve closed
8/8/2012	9:14:51 PM	SiCl4 pre valve closed
8/8/2012	9:14:51 PM	SiCl4 post valve closed
8/8/2012	9:14:51 PM	Main Vac valve closed
8/8/2012	9:14:51 PM	Bubbler valve closed
8/8/2012	9:14:51 PM	Bypass valve opened
8/8/2012	9:14:51 PM	Helium MFC set to  0.000000
8/8/2012	9:14:51 PM	H2 MFC set to  0.000000
8/8/2012	9:14:51 PM	BCl3 MFC set to  0.000000
8/8/2012	9:14:51 PM	PH3 MFC set to  0.000000
8/8/2012	9:14:51 PM	SiCl4 MFC set to  0.000000
8/8/2012	9:14:51 PM	Bypass solenoid MFC set to  0.000000
8/8/2012	9:14:51 PM	Tube furnace set to 0
8/8/2012	9:15:51 PM	Helium valve closed
8/8/2012	9:15:51 PM	H2 valve closed
8/8/2012	9:15:51 PM	BCl3 valve closed
8/8/2012	9:15:51 PM	PH3 valve closed
8/8/2012	9:15:51 PM	SiCl4 pre valve closed
8/8/2012	9:15:51 PM	SiCl4 post valve closed
8/8/2012	9:15:51 PM	Bypass valve closed
8/8/2012	9:15:51 PM	Bubbler valve closed
8/8/2012	9:15:51 PM	Main Vac valve opened
8/8/2012	9:15:51 PM	Helium MFC set to  0.000000
8/8/2012	9:15:51 PM	H2 MFC set to  0.000000
8/8/2012	9:15:51 PM	BCl3 MFC set to  0.000000
8/8/2012	9:15:51 PM	PH3 MFC set to  0.000000
8/8/2012	9:15:51 PM	SiCl4 MFC set to  0.000000
8/8/2012	9:15:51 PM	Bypass solenoid MFC set to  0.000000
8/8/2012	9:15:51 PM	Tube furnace set to 0
8/8/2012	10:15:51 PM	Run finished at 10:15 PM
